The GA–360E Series is a line up of units that provide ultrahigh sensitive, highly accurate, continuous monitoring of trace amounts of impurities contained in gases (N2, O2, He, Ar, H2, and Air) used in the semiconductor manufacturing process. Utilizing a cross–modulation method, GA–360E⁄F360 Series units have no zero drift due to the simultaneous analysis of the zero gas and ordinary time comparison and offer long–term, stable measurement values. A 19–inch rack makes for easy systems upgrade. GA–360E⁄F360 Series analyzers are well suited for use at semiconductor gas production facilities.
Model name | GA–360E |
Principle | Non–dispersive infrared (NDIR) absorption technolgy |
Application | CO, CO2 and CH4 in N2, He, O2, Air, and Ar. |
Range | 0 – 1⁄2⁄5⁄10 ppm |
Min. detection sensitivity | 0.01 ppm (1 sigma) |
Repeatability | ±2% F.S. |
Linearity | ±2% F.S. |
Zero drift | ±0.02 ppm⁄day ±0.03 ppm⁄7days |
Span drift | ±2% F.S.⁄day ±3% F.S.⁄7days |
Response time (T90) | Within 180 sec. |
Sample gas flow rate | Approx. 3.5L⁄min |
Reference gas flow rate | Approx. 3.5L⁄min |
Indication | Measured value, range, alarm |
Reference gas | N2, He, O2, Air, and Ar. |
Sample ⁄ Reference gas pressure | 50∼100kpa |
Alarm | Flow, chopper, power down |
Output | 0 – 1 V, 10V, 4 – 20 mA |
Power | AC 100 V, 110 V, 115 V, 220 V, 230 V, 240 V (to be specified) |
1) The two–component version measures any two of the above three components specified by the customer.
2) Reference gas is to be supplied by the customer.
For more details please contact us here or visit HORIBA Process and Environmental